abstract |
Water-based cutting fluids for use with diamond wiresaws that are used for cutting or otherwise treating hard brittle materials, e.g., silicon ingots, comprise:n A. Water-soluble, polymeric dispersing agent, typically a polycarboxylate; B. Optionally wetting agent; C. Optionally defoamer; B. Optionally corrosion inhibitor; E. Optionally chelant; F. Optionally biocide; and G. Water.n nTypically water comprises at least 50 weight percent of the fluid, and the polycarboxylate is grafted with a polyalkylene glycol, e.g., polyethylene glycol. |