| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33b011e77b33662b8bf1f2ff2de7b661
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6065788a4c8bf060af64ce440b0c1403
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_578f5cfff4e98da9600ba2ea4f7211b1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J11-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J17-49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J17-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J17-04 |
| filingDate |
2012-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9044bbd17ea08bd1eaf910cee4dd9bd5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b140fef7cf4f52cf8c858c997c65a2e6 |
| publicationDate |
2012-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012178335-A1 |
| titleOfInvention |
Method to manufacture reduced mechanical stress electrodes and microcavity plasma device arrays |
| abstract |
In a preferred method of formation embodiment, a thin metal foil or film is obtained or formed with microcavities (such as through holes). The foil or film is anodized symmetrically so as to form a metal-oxide film on the surface of the foil and on the walls of the microcavities. One or more self-patterned metal electrodes are automatically formed and simultaneously buried in the metal oxide created by the anodization process. The electrodes form in a closed circumference around each microcavity, and electrodes for adjacent microcavities can be isolated or connected. If the microcavity is cylindrical, the electrodes form as rings around each cavity. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10488390-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9465960-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10015148-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8995658-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015003064-A3 |
| priorityDate |
2007-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |