| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5ae548aa1272bd9ed5f8932a6981131b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b972d346ecc4ebf9831d912a0579e94e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_10574f470da16429ebf239011636ab7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a6f9f0c5bca1f4c88ee3a9f1ab5e3141 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C4-123 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate |
2011-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2ff533ac8f91037afdbdf6080856319
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5703ea5d34560540520aa9c79cd9a81e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4cbf4e13761591b0d49096fe8af14b8 |
| publicationDate |
2012-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012171418-A1 |
| titleOfInvention |
Low dielectric constant nano-zeolite thin film and manufacturing method thereof |
| abstract |
A fabrication of a low dielectric constant nano-zeolite thin film includes preparing a zeolite nanoparticle suspension that includes zeolite nanoparticles suspended in a solvent and each zeolite nanoparticle includes pores with templating agents disposed inside the pores; performing a heat treatment on a substrate; vaporizing the zeolite nanoparticle suspension to form vaporized droplets containing the zeolite nanoparticles; using a gas to carry the vaporized droplets containing the zeolite nanoparticles into a plasma to perform a plasma reaction; and allowing the plasma-treated zeolite nanoparticles to deposit on the heated substrate to form a nano-zeolite thin film with a dielectric constant less than 2 and the templating agents removed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11642552-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9040126-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10273158-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110520098-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3590492-A4 |
| priorityDate |
2010-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |