| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_43b4f645bb840c82c4a801a4127e5f77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e457254671f5ed1386de529f9a3637c4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0043 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2010-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c2ecc1bd0d9a04006eadec2f7afb0ac |
| publicationDate |
2012-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012156625-A1 |
| titleOfInvention |
Nano-fabrication method |
| abstract |
Disclosed herein is a nano-fabrication method, which includes the step of: (a) forming an inorganic resist layer on a substrate; (b) forming an organic photoresist layer on the inorganic resist layer; (c) irradiating both the organic photoresist layer and the inorganic resist layer with a laser beam to form a first exposed region of the inorganic resist layer and a second exposed region of the organic photoresist layer; (d) removing the inorganic resist layer of the first exposed region and the organic photoresist layer of the second exposed region to form a patterned inorganic resist layer and a patterned organic photoresist layer; and (e) removing the patterned organic photoresist layer from the patterned inorganic resist layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113249696-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10319793-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016075885-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014092718-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016057598-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9633685-B2 |
| priorityDate |
2010-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |