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publicationDate 2012-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2012132613-A1
titleOfInvention Wafer-scale needle array
abstract Methods for wafer-scale fabrication of needle arrays can include mechanically modifying a wafer to produce a plurality of vertically-extending columns. The columns are etched to round and reshape the columns into substantially uniformly shaped needles. Needle arrays having needle width non-uniformity of less than about 3% and length non-uniformity of less than about 2% can be produced.
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