| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4783602863fc0aae50123359fe49c030
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2ce9eeb5c9960a7b396ad1752ffa9965
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_53a0c1ad5b9388f76b600a258fb19799
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_09a14a1f5fcdbe0b2f87166155748ae8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4e522559b8890a2c12283db6ab3b0b75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dd000031049988ecd199a2c5e6ec08ed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4f667450390dbe22f6488530c3850e67 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-3263 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D7-5009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3765
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3773
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D3-3723 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-04 |
| filingDate |
2011-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80560a3d72941e33ad28189d1d59a8fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce0d027619d35aba4ddac084a08e146c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_285eafc4b2ad2179436b27acea900ab5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a82fea06b82e3460e29b5ae0664fd0b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1a39eb57c6a64afb3824961b50de564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_638bc83335c736fff7c5428abf793764
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e9b6e6abc67b43d9405075bf9ed7525 |
| publicationDate |
2012-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012132234-A1 |
| titleOfInvention |
Apparatus for particle removal by single-phase and two-phase media |
| abstract |
A cleaning system for removing contaminants on a surface of a patterned substrate for defining integrated circuit devices is provided. The system includes a substrate carrier for supporting edges of the patterned substrate, and a cleaning head positioned over the patterned substrate. The cleaning head includes a plurality of dispensing holes to dispense a cleaning material on the surface the patterned substrate for defining integrated circuit devices, wherein the cleaning material includes polymers of a polymeric compound. The cleaning head is coupled to a storage of the cleaning material, which is coupled to the cleaning material preparation system. A support structure holds the cleaning head in proximity to the surface of the patterned substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110142271-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10844333-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015175521-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016118613-A1 |
| priorityDate |
2007-12-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |