| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_10b6920efbe3da3edaf2a73b31810d33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0f956f1ce6f8da13de33ac3da87c65b8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02363
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate |
2010-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8ce46a69cab3be02901035eb92356231 |
| publicationDate |
2012-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012112321-A1 |
| titleOfInvention |
Alkaline etching liquid for texturing a silicon wafer surface |
| abstract |
An etching liquid for texturing a silicon wafer surface is provided. The etching liquid may include an aqueous solution of at least one alkaline etching agent and at least one polysaccharide or derivative thereof. Also provided is a process for texture etching a silicon wafer using the etching liquid of the invention. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3840060-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/IT-PA20120012-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113964215-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012208370-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-3105583-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8741168-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9972696-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013065400-A1 |
| priorityDate |
2010-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |