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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-8445
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filingDate 2009-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a5d018c2cfc739cbbb446c1706a5b0e
publicationDate 2012-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2012104945-A1
titleOfInvention Sealing film for organic el element, organic el element, and organic el display
abstract An object of this invention is to provide a sealing film for an organic EL element having excellent moisture resistance, due to the absence of pinholes. A sealing film of this invention is a sealing film for an organic EL element having a layered structure of at least three layers with a silicon nitride film and a silicon oxynitride film layered in alternation, and is characterized in that odd-numbered layers from the side of the organic EL element are silicon nitride films having a film thickness (T 1 ) of 200 nm or greater, and even-numbered layers from the side of the organic EL element are silicon oxynitride films having a film thickness (T 2 ) of 20 nm or greater and 50 nm or less.
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priorityDate 2009-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 42.