| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0895056eb0ad9c210c8c632fa22668d4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J2483-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09J5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1643
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1629
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B41J2-1646 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B37-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B37-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B37-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B37-30 |
| filingDate |
2011-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_403e7e87e719e5f38d5d9a96ab73db9b |
| publicationDate |
2012-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012094132-A1 |
| titleOfInvention |
Method of Manufacturing a Part of a MEMS System |
| abstract |
A method of manufacturing part of a microelectromechanical system (MEMS) and such part manufactured by the method are provided. The method comprises preparing first and second base members; imparting liquid repellency for a liquid material to at least part of a bonding film non-formation region of the first base member to form a liquid repellent region thereon; supplying the liquid material onto the first base member to selectively form a liquid coating on a bonding film formation region of the first base member with the aid of the liquid repellency of the liquid repellent region; drying the liquid coating to obtain a bonding film on the bonding film formation region; and bonding the first and second base members together through the bonding film due to a bonding property developed in the vicinity of a surface of the bonding film by applying energy thereto to obtain the bonded body. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104228304-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107738522-A |
| priorityDate |
2008-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |