| abstract |
A fluid ejection nozzle arrangement is provided having drive circuitry deposited on a substrate, subsequent etchant layers deposited on the drive circuitry to define a nozzle chamber with walls and a roof structure defining a fluid ejection port, and a stacked capacitive actuator arranged in the chamber. The actuator has alternate electrode plates sandwiched between a compressible polymer. Activation of the stacked actuator draws the electrode plates together to compress the polymer storing energy therein, with subsequent de-activation releasing the energy to eject fluid within the chamber from the ejection port. |