| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_68edbe78aace17a917ce810b22f2368f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_26b08c0c717ac34451dbe54233196b79 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T2207-30148 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G06T7-0006 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06K9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H04N7-18 |
| filingDate |
2010-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6488cfbfa7354c5ba227f3feef887e48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b18f16bf6d1f1f22601a28436db8087 |
| publicationDate |
2012-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012086796-A1 |
| titleOfInvention |
Coordinate fusion and thickness calibration for semiconductor wafer edge inspection |
| abstract |
A system may include a support configured to rotatably support a wafer. The system may also include an imager for generating an image of a wafer, where the image includes a first coordinate reference. The system may also include a profiler for generating a profile of the wafer, where the profile includes a second coordinate reference. The system may further include control programming for locating at least one structural feature of an edge of the wafer recognizable by both the imager and the profiler for allowing the first coordinate reference to be mapped to the second coordinate reference. The wafer used in calibration may have discrete edge features detectable in an edge imager and in an edge profiler. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015243018-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017352146-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I664390-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9885671-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9734568-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017169556-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10325361-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11268912-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106030775-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9645097-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106871789-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016119561-A1 |
| priorityDate |
2010-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |