| abstract |
A fluorinated ester monomer is provided having formula (1) wherein R 1 is H, CH 3 or CF 3 , R 2 and R 3 are H or a monovalent hydrocarbon group, or R 2 and R 3 forms a hydrocarbon ring, R 4 is a monovalent hydrocarbon group, and k is 0 or 1. A polymer obtained from the monomer has transparency to radiation with a wavelength of up to 200 nm and appropriate alkaline hydrolysis, is constructed such that any of water repellency, water slip and surface segregation may be adjusted by a choice of its structure, and is useful in forming ArF immersion lithography materials. |