| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03c2cfa05eef248502c80c83ca480eb4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1bbbe34dd19b688297bed4be9984e79a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_59424078bf19bb2e84bb9d0bfcaaa5e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8642a967fab9ea977e20b3dd91bbecd9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-665
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66636 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238 |
| filingDate |
2010-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d8a4b122469bddfd76445c3628cd512
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c82881a0bf1090a12c8dc39f70b6c72
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29e35861a0b26dd89fef768930dc168f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9455ed185d79317a23dcd69232f7849 |
| publicationDate |
2012-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012074503-A1 |
| titleOfInvention |
Planar Silicide Semiconductor Structure |
| abstract |
A planar silicide structure and method of fabrication is disclosed. A FET having a silicided raised source-drain structure is formed where the height of the source-drain structures are the same as the height of the gates, simplifying the process of forming contacts on the FET. One embodiment utilizes a replacement metal gate FET and another embodiment utilizes a gate-first FET |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017117279-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8598661-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014162424-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10121789-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8853041-B2 |
| priorityDate |
2010-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |