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publicationDate 2012-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2012070361-A1
titleOfInvention Method for collection of hexachlorodisilane and plant for the method
abstract Disclosed is a method for collecting hexachlorodisilane which is produced as a by-product in the production of trichlorosilane from tetrachlorosilane and hydrogen. The method has the steps of: reacting a source gas composed of vaporized trichlorosilane and hydrogen at a temperature ranging from 700 to 1400° C. to yield a reaction product gas; cooling the reaction product gas to a temperature ranging from 30 to 60° C. to yield a cooled condensate liquid containing hexachlorodisilane; and concentrating and collecting a high boiling material containing hexachlorodisilane from the cooled condensate liquid.
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