| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bbdc68ca0aa38fef2d059853ef2b31e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7a2206ee4f4b248cf8cd5c8fc7023674 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66 |
| filingDate |
2011-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08f8891251398a342580a24676ea00b3 |
| publicationDate |
2012-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012068156-A1 |
| titleOfInvention |
InN Nanowire Based Multifunctional Nanocantilever Sensors |
| abstract |
Sensor are generally provided that include a layer of silicon oxide on a portion of a n+ layer to form an uneven surface where the layer of silicon oxide defines a thicker region than an exposed portion of the n+ layer. First and second metal contacts can be on the layer of silicon oxide, with first and second nanowires extending respectively from a first base on the first metal contact and a second base on the second metal contact. The first nanowire and the second nanowire are connected together at an apex to form a v-shaped nanocantilever, wherein the apex is positioned over the exposed n+ layer, and wherein the nanowires comprise indium and nitrogen. Methods of fabricating such sensors, along with methods of their use, are also generally provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108519408-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9535063-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013287948-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9175385-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9566567-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014031709-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10900927-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108519409-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3608661-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020522674-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014087939-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9297796-B2 |
| priorityDate |
2010-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |