| abstract |
The invention relates to a layer system, comprising a substrate ( 1 ) on which firstly at least one barrier layer ( 2 ), followed by an intermediate layer ( 3 ) acting as an etch-stop layer and subsequently at least one electrically conductive layer ( 4 ) are deposited, and wherein the electrically conductive layer ( 4 ) is structured with wet-chemical etching media. The invention further relates to a method for the production and uses of a layer system of this type. |