| abstract |
A rotary sputtering cathode, including a tubular member having a length in a longitudinal direction and defining an external surface, a first longitudinal bracket extending in the longitudinal direction along the length of the tubular member, and a second longitudinal bracket extending in the longitudinal direction along the length of the tubular member, is provided. Additional longitudinal brackets (e.g., a third, fourth, fifth, and so forth,) may also be included along the length of the tubular member. A target, which comprises a sputtering material, can be positioned such that its back surface is facing the external surface of the tubular member. The first longitudinal bracket and the second longitudinal bracket removably hold the first target therebetween such that the first back surface of the first target is facing the external surface of the tubular member. Methods are also provided for sputtering a non-bonded target. |