| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2e6a8a2b40d19600af7f49f2cddee99e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_650fcd3e09d9a1f7de9e3bd104843bab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7442b6cce4e96d3dc4a380851e9224d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cd634639faa1275508bdcb810d0b2b6d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_991d37c5525578689ef229f7536ce868 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D3-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D3-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
2011-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f97d6635ff590a6042737326bfcb6f9e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e46b88ac10440aeb7aed1e110c31c44b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb845740a3816d4770e2e6505fe6d474
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e5fa4f01b17e4a6ecffb56f5198d38d |
| publicationDate |
2012-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012043218-A1 |
| titleOfInvention |
Copper electrodeposition in microelectronics |
| abstract |
A method and composition for electroplating Cu onto a substrate in the manufacture of a microelectronic device involving and electrolytic solution containing a source of Cu ions and a substituted pyridyl polymer compound for leveling. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103060860-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015198821-A1 |
| priorityDate |
2002-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |