| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60903e067bc58c4e0af8b27e5f948d55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9dc1c43d6a4cf8b22e76f6ce243f921c |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4483
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45591 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 |
| filingDate |
2010-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25da9109cb5650ea657fd4da18cfeca9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ec5e69e636fab75a66a9f67aeaebaaa8 |
| publicationDate |
2012-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012034378-A1 |
| titleOfInvention |
Delivery device and method of use thereof |
| abstract |
A delivery device comprises an inlet port and an outlet port. The delivery device comprises an inlet chamber and an outlet chamber, with the outlet chamber being opposedly disposed to the inlet chamber and in fluid communication with the inlet chamber via a conical section. The outlet chamber comprises a labyrinth that is operative to prevent solid particles of a solid precursor compound contained in the delivery device from leaving the delivery device while at the same time permitting vapors of the solid precursor compound to leave the delivery device via the outlet port. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11773486-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10612143-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11624113-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016273101-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8894770-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11634812-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9068260-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11377732-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11047045-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013243955-A1 |
| priorityDate |
2010-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |