| abstract |
This invention relates to a micro-electromechanical nozzle arrangement for an inkjet printhead. The arrangement includes a substrate defining an inverted pyramidal ink chamber with a vertex thereof terminating at an ink supply channel through the substrate. The substrate includes a layer of drive circuitry. The arrangement also includes a roof structure connected to the drive circuitry layer and covering the ink chamber, the roof structure defining a fluid ejection nozzle rim above said chamber. Also included is a plurality of actuators radially spaced about, and displaceable with respect to, the nozzle rim, each actuator having a serpentine heater element configured to thermally expand upon receiving current from the drive circuitry thereby moving said actuators into the chamber and operatively increasing a fluid pressure inside the chamber to eject a drop of ink via the ejection nozzle. |