| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_852cac047f057408ca7a03f6e34a2c9c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7908c0655a23ec2e8e0551eb165ea07a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c6d33a2514f2ab81051bda293dc5f426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ab024e1464597c6ed3c6cdf4072a57fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_36d845d329f10acae7a7598d3c92c174 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02658
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0237
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02521
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3086 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-467
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00 |
| filingDate |
2011-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ce7a67b807b8b16f9e0a93b6b20d95e0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_deda8aa353942a0f4f57f1646aae868b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60ca4c5fc3bd15647f7d4971d742efdd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_074ed8553861560b463de773a363d8b7 |
| publicationDate |
2012-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012015143-A1 |
| titleOfInvention |
Epitaxial substrate having nano-rugged surface and fabrication thereof |
| abstract |
The invention provides an epitaxial substrate and fabrication thereof. The epitaxial substrate according to the invention includes a crystalline substrate. In particular, the crystalline substrate has an epitaxial surface which is nano-rugged and non-patterned. The epitaxial substrate according to the invention thereon benefits a compound semiconductor material in growth of epitaxy films with excellent quality. Moreover, the fabrication of the epitaxial substrate according to the invention has advantages of low cost and rapid production. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11370076-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017239773-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9318314-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9721767-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015221483-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017152675-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10347467-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107099844-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017149079-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013288455-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10350725-B2 |
| priorityDate |
2010-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |