Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_081f0dd2bf4d156a50d286d8cfdfa969 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_154f4ff1ee0ddb222496bacf4379fa2a http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_554c1e9ed6ba1e869674b3936f38e08d http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2531-025 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2531-94 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-653 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J31-0222 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C67-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C67-04 |
filingDate |
2010-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6af2553793bdcda80dd90069ea2170ef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93d06c6472afc1568ab649abd5f81d88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b64b9f9d16c0d5ef50c5398d1c21a20 |
publicationDate |
2012-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2012004444-A1 |
titleOfInvention |
Process for Producing Monomer for Fluorinated Resist |
abstract |
According to the present invention, an α-substituted acrylic ester monomer for a fluorinated resist is produced by direct addition of an α-substituted acrylic acid to a fluorinated alkene in the presence of a specific acid catalyst having a sulfonyl group. By the use of such a specific acid catalyst, it is possible to achieve industrial-scale production of the α-substituted acrylic ester monomer for the fluorinated resist by carrying out the target addition reaction of the fluorinated alkene and the α-substituted acrylic acid efficiently during the occurrence of side reactions such as isomerization of the alkene, generation of a diol and excessive addition of the α-substituted acrylic acid. |
priorityDate |
2009-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |