| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_75754c8b5aa7ba43ba5a01941912e9ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_171319820518b75eacd986fee3db718c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_81f36156b5f7be0ce9a114d53a0f3d0c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c97d5960efdf4bd687bd4ac2cb873ba8 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24612
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24479
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B22F7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0037
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y99-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C25-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00 |
| filingDate |
2011-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd7ce3d270d9a83cf78be9526aa0c09b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_558b2d466dabdad2a80267fc6d57d8bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_48304a6db330c3a876c04a2df69ac07f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1309003d29290fb921c79e9bb3f8472c |
| publicationDate |
2011-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011318535-A1 |
| titleOfInvention |
Three-dimensional nanostructures and method for fabricating the same |
| abstract |
A three-dimensional nanostructures and a method for fabricating the same, and more particularly to three-dimensional structures of various shapes having high aspect ratio and uniformity in large area and a method of fabricating the same by attaching a target material to the outer surface of patterned polymer structures using an ion bombardment phenomenon occurring during a physical ion etching process to form target material-polymer composite structures, and then removing the polymer from the target material-polymer structures. A three-dimensional nanostructures with high aspect ratio and uniformity can be fabricated by a simple process at low cost by using the ion bombardment phenomenon occurring during physical ion etching. Also, nanostructures of various shapes can be easily fabricated by controlling the pattern and shape of polymer structures. In addition, uniform fine nanostructures having a thickness of 10 nm or less can be formed in a large area. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017123742-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10894352-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10532510-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11099145-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11298869-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015144174-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021096394-A3 |
| priorityDate |
2010-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |