abstract |
A microfluidic device for processing a fluid, the microfluidic device having an inlet for receiving the fluid, functional sections for processing the fluid, a flow-path extending from the inlet into at least one of the functional sections, a flow rate sensor with a conductive element positioned in proximity of the fluid flowing along the flow-path, CMOS circuitry configured for measuring the temperature of the conductive element, wherein, the CMOS circuitry is configured to provide a predetermined current through the conductive element and measure the electrical resistance of the conductive element such that a flow speed is derived from the current, the temperature sensor output and the electrical resistance, and a flow rate is derived using the flow speed and the flow-path cross section transverse to the flow direction at the conductive element. |