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filingDate 2010-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1c6f3b72e4fdb1c3da75de5dd40dc6e5
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publicationDate 2011-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2011304023-A1
titleOfInvention method of generating a hole or recess or well in a substrate
abstract The present invention relates to a method of generating a hole or recess or well in an electrically insulating or semiconducting substrate, and to a hole or recess or well in a substrate generated by this method. The invention also relates to an array of holes or recesses or wells in a substrate generated by the method. The invention also relates to a device for performing the method according to the present invention.
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priorityDate 2009-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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