| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a05f7f5ba22d6b7b0141ab8f9b3e653
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_202865f17f44e7c80ef2f4260a098dc7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b32038a85e3de86f07c72793d0b24972 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2204-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2201-42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0275
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B7-242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2011-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78afb8409f14e6e834caccb8cb07d350
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfea817a1b7426904218ab0b4380cc83
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1504347664ae51f6423c4c88ae2171e0 |
| publicationDate |
2011-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011287219-A1 |
| titleOfInvention |
Synthetic quartz glass substrate and making method |
| abstract |
A synthetic quartz glass substrate has a surface of 6 inch squares including a central surface area of 132 mm squares. The central surface area of 132 mm squares has a flatness of up to 50 nm. A frame region obtained by subtracting the central surface area of 132 mm squares from the central surface area of 148 mm squares has a flatness of up to 150 nm. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10146126-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10146125-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10948814-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6229807-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9323141-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9229316-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018157166-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013203324-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018136461-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10578961-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017090277-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018149964-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9616542-B2 |
| priorityDate |
2010-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |