| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_41ac4f9d7f136bda73259be527e37d99
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_68a9e7e08952ee9abfaa6a1e94d2dcd8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c7e72c4c3aabaecb44952b5027c4fddb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_93d341e3ac3ee3dcb3636a56aec1ed40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5014a1e72b12823251038e692bd904fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3738263fdbdf943fa25d22d5b60f0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32972
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2011-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c62f7cc3998f80b82b2e2a982f7ed8b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c247f8096d4f0cd1ce829e8b1a5e7c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d1418ea4661ca3c1ccda0ba5fbd652a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5282539f880211a0483bc3b9c12b7637
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed163fc448a300d790d8282dc4fcfd86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f06da57aa565828a671e5e5b9e11291f |
| publicationDate |
2011-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011284163-A1 |
| titleOfInvention |
Plasma processing apparatus |
| abstract |
A plasma processing apparatus includes a chamber for processing a substrate. A plasma generator is provided to generate plasma within the chamber. A window is provided in a sidewall of the chamber, and the window transmits light from the plasma within the chamber. A photocatalytic layer is provided on an inner surface of the window such that the photocatalytic layer is activated as a result of exposure to light from the plasma to decompose a residual product on the inner surface of the window. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11508562-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11715628-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109360796-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104810308-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016141148-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016181073-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022044912-A1 |
| priorityDate |
2010-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |