| abstract |
The present invention relates to a process for purifying low molecular weight hydridosilane solutions, in which a solution to be purified comprising a) at least one low molecular weight hydridosilane, b) at least one solvent and c) at least one impurity selected from the group of the compounds having at least 20 silicon atoms and/or the group of the homogeneous catalyst systems is subjected to a crossflow membrane process with at least one membrane separation step using a permeation membrane. |