| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D63-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J8-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D61-00 |
| filingDate |
2010-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25b9662cc7b5081d3a66e21b0f1155f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea2f4c8b008f38b35cae5d7f6c399222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c60fff14ef82dcc2e61b15e594b76db8 |
| publicationDate |
2011-10-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011256041-A1 |
| titleOfInvention |
Fluid filtration for substrate processing chamber |
| abstract |
A filter for filtering a fluid in a substrate processing apparatus comprises first and second stages that are connected to one another. A delivery system provides a vaporized liquid to the filter. The first stage of the filter comprises a basic compound, and the second stage of the filter comprises a desiccant. A second filter comprises a permeation filter with permeable membrane to filter the fluid. Methods of filtering the fluid to reduce formation of undesirable process residues using the filter(s) are also described. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10816141-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9558936-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10121685-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022139730-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11324845-B1 |
| priorityDate |
2009-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |