http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011250354-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0534e551838bc80048214c5c27970d07
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-301
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
filingDate 2010-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_621833d90613ad1cd50f2aa3269e7ee3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cabf5185fc1f66f5d9608c09e287b065
publicationDate 2011-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2011250354-A1
titleOfInvention Titanium-containing precursors for vapor deposition
abstract Disclosed are titanium-containing precursors and methods of synthesizing the same. The compounds may be used to deposit titanium, titanium oxide, strontium-titanium oxide, and barium strontium titanate containing layers using vapor deposition methods such as chemical vapor deposition or atomic layer deposition.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9822132-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11326255-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014015232-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10570513-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9593133-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9371338-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9382268-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9938303-B2
priorityDate 2010-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458122052
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129950273
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458122050
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393345
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142117822
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458122051
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458342437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458068005
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8182
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129956267
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23435
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID248096342
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458122272
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128219813
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID138789731
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID138789732
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406344
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466465537
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129729763
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142387964
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129262772
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8150
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129788565
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128096360
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8925
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127460394
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7612
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID67105
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID188318
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID324242756
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226459332
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458066438
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID138789737
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8189
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458067230
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID138789735
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID324590520
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID138789736
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129214490
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID138789733
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID138789734
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3672
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395293
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3767
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID247599563
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458111225
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458073975
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405456

Total number of triples: 84.