| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3a62c92e56568bd104089aac22ca487b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-58 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-14 |
| filingDate |
2011-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aaa26d7284c6169b88584ed1bfc96db3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f1793be0d32c7d77102ab97c486934a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44bc5d5f8f002967868fcaa871160a43
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea29c5d983195382b3645d5435c997b3 |
| publicationDate |
2011-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011244377-A1 |
| titleOfInvention |
Fluorine-passivated reticles for use in lithography and methods for fabricating the same |
| abstract |
Fluorine-passivated reticles for use in lithography and methods for fabricating and using such reticles are provided. According to one embodiment, a method for performing photolithography comprises placing a fluorine-passivated reticle between an illumination source and a target semiconductor wafer and causing electromagnetic radiation to pass from the illumination source through the fluorine-passivated reticle to the target semiconductor wafer. In another embodiment, a fluorine-passivated reticle comprises a substrate and a patterned fluorine-passivated absorber material layer overlying the substrate. According to another embodiment, a method for fabricating a reticle for use in photolithography comprises providing a substrate and forming a fluorine-passivated absorber material layer overlying the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10156783-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9581894-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9122175-B2 |
| priorityDate |
2008-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |