| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31678 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B15-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-02 |
| filingDate |
2011-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aaa4ee2c6117aceb641f98a623d536cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9c8ada1c871f8bece78cc8999960699 |
| publicationDate |
2011-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011229719-A1 |
| titleOfInvention |
Manufacturing method for crystal, manufacturing apparatus for crystal, and stacked film |
| abstract |
A manufacturing method for a crystal, a manufacturing apparatus for a crystal, and a stacked film capable of growing a high-quality crystal are provided. The manufacturing method for a crystal includes the steps of: preparing a seed crystal having a frontside surface and a backside surface opposite to the frontside surface; forming at least one film selected from the group consisting of a hard carbon film, a diamond film, a tantalum film, and a tantalum carbide film on the backside surface of the seed crystal; and growing the crystal on the frontside surface of the seed crystal. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10631370-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114561694-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103484837-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103088411-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103160928-A |
| priorityDate |
2010-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |