http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011229707-A1

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filingDate 2011-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2ac8c97059cb0c82758e03d4c106f795
publicationDate 2011-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2011229707-A1
titleOfInvention Method of manufacturing single crystal ingot and wafer manufactured by thereby
abstract A method of manufacturing single crystal ingot and a wafer manufactured thereby are provided. The method includes pulling and growing an ingot in a crucible; and cooling the ingot, wherein during the pulling of the ingot, a pulling rate of the ingot is configured to generate a vacancy of less than 80 nm; when the ingot is cooled at an interval of about 1000 to about 2000, a cooling speed of the ingot is slow cooling to allow the vacancy of less than about 80 nm to grow into a vacancy of more than about 80 nm.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109537045-A
priorityDate 2010-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 22.