http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011210402-A1

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filingDate 2011-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_259122b98ba1fe5a3b27ece63c92a78b
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publicationDate 2011-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2011210402-A1
titleOfInvention Metal-gate high-k reference structure
abstract Disclosed are embodiments of an integrated circuit structure that incorporates at least two field effect transistors (FETs) that have the same conductivity type and essentially identical semiconductor bodies (i.e., the same semiconductor material and, thereby the same conduction and valence band energies, the same source, drain, and channel dopant profiles, the same channel widths and lengths, etc.). However, due to different gate structures with different effective work functions, at least one of which is between the conduction and valence band energies of the semiconductor bodies, these FETs have selectively different threshold voltages, which are independent of process variables. Furthermore, through the use of different high-k dielectric materials and/or metal gate conductor materials, the embodiments allow threshold voltage differences of less than 700 mV to be achieved so that the integrated circuit structure can function at power supply voltages below 1.0V. Also disclosed are method embodiments for forming the integrated circuit structure.
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