http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011209528-A1
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d0693ed4f2b7b1fab97515ac2f1f311c |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-0261 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-0255 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B44C1-227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-2208 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-10 |
filingDate | 2010-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ed61d81cf1e369dbe6dc445d58e1ed6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a55250f7184e501f0d828e7f10ad637e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f83c4b744e810e5ae9ad3fe6acb15628 |
publicationDate | 2011-09-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-2011209528-A1 |
titleOfInvention | Nozzle plate containing multiple micro-orifices for cascade impactor and method for manufacturing the same |
abstract | A nozzle plate containing multiple micro-orifices for the cascade impactor and a method for manufacturing the same are disclosed. The nozzle plate is formed by a series of semiconductor processes, including lithography, etching and electroplating. The nozzle plate comprises a plate body and a plurality of micro-orifices formed on the plate body. The orifice has a diameter which gradually expands in the direction away from the bottom of the plate body to achieve a smooth inner surface, allowing particles to pass therethrough smoothly without being clogged in the nozzle plate. |
priorityDate | 2010-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.