| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fec576c38e34882531ca37d6b922bf42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2014 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2010-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_790a4f1ccda897980b582426db18d826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4638865d574b399f8b0963e73c8b0ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31a031121218d2bf39ecac355d41b3b2 |
| publicationDate |
2011-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011207052-A1 |
| titleOfInvention |
Sulfonamide-containing photoresist compositions and methods of use |
| abstract |
Provided are sulfonamide-containing photoresist compositions for use in lithographic processes that have improved properties for high resolution, low blur imaging. Also provided are alcohol-soluble photoresists for resist-on-resist applications. The sulfonamide-containing photoresist compositions of the present invention include positive-tone photoresist compositions that have sulfonamide-substituted repeat units with branched linking group as shown in Formula (I): |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9422445-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3029078-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016533532-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015185607-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9703200-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015185615-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011207051-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9772558-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9223217-B2 |
| priorityDate |
2010-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |