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filingDate 2011-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2011-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2011206921-A1
titleOfInvention Porous Organosilicate Layers, and Vapor Deposition Systems and Methods for Preparing Same
abstract The present invention provides porous organosilicate layers, and vapor deposition systems and methods for preparing such layers on substrates. The porous organosilicate layers are useful, for example, as masks.
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