| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0bdc95ab3978c95880b8eb82706b1af8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a284303ab3e8e1b540d5b19056e57a0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_48b389df7e99d69ddbd3c3bcec0db364
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_005f894385e69c70b017dcab887550e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5b3a3c10347d432c7bd14038c2707033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_06187c775162b2fdd03db06b3617b360
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bc489d409f8d00848a92f3a1d8df43c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_56808218be7c3ebb006df29b7e40c325 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-901 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D17-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-163
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67766
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1886 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D17-00 |
| filingDate |
2011-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ff5b228e7046845d538efd15e4c0077
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70aba8f986ce744318a55205f6a4de78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_464ccfb26d7266cfe2d8d2747cc98550
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4945105b1ad3fd2321210c1e1b23eb75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d70319c529bb9d34df3b609f722ef20e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3a3f2bd6ece83d8512700bc59c42743
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_434e3a1c8d9ef21dd7194f7ac7c516ae
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d469a70e7e35f88d6ecab7be84b45ac9 |
| publicationDate |
2011-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011203518-A1 |
| titleOfInvention |
Substrate processing method and apparatus |
| abstract |
A substrate processing method and apparatus can securely carry out a pre-plating treatment that enables uniform plating in the necessary area of the surface of a substrate. The substrate processing method carries out a cleaning treatment and a catalyst-imparting treatment of a surface of a substrate as pre-plating treatments and then electroless plates a metal film on the catalyst-imparted surface of the substrate. The cleaning treatment is carried out in a wider area of the surface of the substrate than that area to which a catalyst is imparted by the catalyst-imparting treatment. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104766814-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021221872-A1 |
| priorityDate |
2002-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |