http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011200513-A1

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filingDate 2009-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f3c1796b7703e49897eaf382be637b85
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publicationDate 2011-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2011200513-A1
titleOfInvention Method for producing monosilane and tetraalkoxysilane
abstract The present invention relates to method for producing monosilane and tetraalkoxysilane comprising subjecting alkoxysilane represented by formula (1) n H n Si(OR) 4-n   (1)n n wherein R represents alkyl group having 1 to 6 carbon atoms and n represents an integer of from 1 to 3, to dismutation reaction in a gaseous phase in the presence of a catalyst containing an alkali metal fluoride and a catalyst activator. n The method can solve problems in a method for producing monosilane and tetraalkoxysilane by dismutation reaction of alkoxysilane in a liquid phase: i.e. problems such that separation from the solvent is difficult and that the reaction is too slow and not suitable for industrial production.
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