http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011186229-A1

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filingDate 2011-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_800b26d6a9a2c5e746d606161cce34a8
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publicationDate 2011-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2011186229-A1
titleOfInvention Gas shower structure and substrate processing apparatus
abstract Screws 4 are inserted from a bottom surface of a ceiling plate 32 and screwed to a base plate 31 , and the ceiling plate 32 and the base plate 31 are press-connected to each other by an elastic restoring force of an elastic member 51 interposed between a head of the screw 4 and the ceiling plate 32 . A gap is formed between the head and the ceiling plate 32 . Further, a periphery of the head is covered with a cover via a ring-shaped elastic member 52 . In another embodiment, a periphery of a base plate 31 is protruded from a periphery of a ceiling plate 32 , and the protruded portion of the base plate 31 and a ring-shaped clamp positioned at an outer side of the ceiling plate 32 are joined by screws. Here, an elastic member is interposed between the clamp and the ceiling plate 32.
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9885114-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017349994-A1
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priorityDate 2010-02-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 42.