| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T137-8593
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T156-1062 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4558
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B37-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F15D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B38-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B37-02 |
| filingDate |
2009-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1452f7078b0e3ed06f986ca0d3a12239
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3df70002383f44b089a15308c54816d9 |
| publicationDate |
2011-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011186226-A1 |
| titleOfInvention |
Gas supply member, plasma processing apparatus, and method of manufacturing the gas supply member |
| abstract |
A gas supply member includes an annular portion in which a passage for a gas extending to have an annular shape is provided. The annular portion includes a first member having an annular shape and including a flat plate portion in which a plurality of gas supply holes through which a gas is supplied are formed, and a second member having an annular shape and forming a space, which becomes the passage for the gas, between the first member and the second member. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10074521-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9741575-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015252475-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11728141-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11244811-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10381461-B2 |
| priorityDate |
2008-09-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |