| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cd67fb67994e72f05f05c6ac1a65383e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2434946a393ffbac0f371a7e81da5ab6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2562-125 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-4041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61N1-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61N1-0551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61N1-0536 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61N1-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00 |
| filingDate |
2009-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_334dd0a4ea2b87b0a86d7e7c94b43bdb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e53c677a1ae8cd8bd617760df60b7bd4 |
| publicationDate |
2011-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011184503-A1 |
| titleOfInvention |
Method of making 3-dimensional neural probes having electrical and chemical interfaces |
| abstract |
A method of fabricating a three-dimensional neural probe includes the steps of: growing thermal oxide layer; depositing a layer of Au/Cr on the thermal oxide layer; patterning the layer of Au/Cr; depositing a layer of parylene C; etching the thermal oxide layer to release a plurality of islands; and folding the islands onto one another in stacked relation. The layer of Au/Cr is formed by an evaporation process, and the layer of parylene C is deposited to a thickness of approximately 8 μm. DRIE is used to perform the etching, and HF is used to remove the thermal oxide. A spacer is disposed intermediate of two of the islands. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11213653-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10531882-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10806396-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10441770-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10434251-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10363394-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10065016-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014371712-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9844585-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11534592-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10137244-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9919129-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11260201-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011021943-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10456533-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10602950-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11602375-B2 |
| priorityDate |
2008-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |