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publicationNumber US-2011174770-A1
titleOfInvention Method for modifying an etch rate of a material layer using energetic charged particles
abstract A method of etching a material layer on a substrate is described. In one embodiment, the method includes modifying an etch resistance of a material layer to a pre-determined etch process by doping the material layer using energetic charged particles, and etching the modified material layer using the pre-determined etch process.
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