| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1755eede76ea7e719a3e0d2843cd793 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-2027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-229
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-00 |
| filingDate |
2009-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aea3a2742872e7a6a5f58de54f6a3d65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8e5922a20392d1bd4e9ac71de75c99f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6ed282acc36cd0ace69ce6f45eee7f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_912b77076736ed03bd1c238e3b140a0f |
| publicationDate |
2011-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011168674-A1 |
| titleOfInvention |
Plasma processing method and apparatus |
| abstract |
In atmospheric-pressure plasma processing, fluctuation of a recovery rate or a recovery concentration of a fluorine raw material is restrained to secure stability of processing. n Exhaust gas led out from an atmospheric-pressure plasma processing part 2 to an exhaust line 30 is separated by a separation membrane 41 of a separation part 4 into collected gas for a recovered line 50 and release gas for a release line 60. The collected gas is utilized as at least a part of processing gas. At the time of the separation, physical quantity (preferably pressure) of at least two gases of the collected gas, the release gas and the exhaust gas related to the separation are regulated according to flow rate of the processing gas so that either one or both of a recovery rate or a recovery concentration of a fluorine raw material are as desired. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3015156-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8973397-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015187562-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013104597-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9234832-B2 |
| priorityDate |
2008-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |