| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e96496a9949403e2af2ca913e65bfec |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y99-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-00 |
| filingDate |
2010-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d634c87702d1df1e7e3aa8af68aa6c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25b43d4a831b8ab7b2c07d9da020d29e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb21bcaa7b5402c0fd77b33d07548ab5 |
| publicationDate |
2011-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011165329-A1 |
| titleOfInvention |
Force Feedback Leveling of Tip Arrays for Nanolithography |
| abstract |
A method of leveling a polymer pen array includes contacting a pen array with a surface and measuring a total force exerted on the surface by the pen array, the pen array being disposed at a first angle with respect to a first axis of the surface and a second angle with respect to a second axis of the surface; tilting one or both of the pen array and the surface to vary the first and second angles of the pen array with respect to the surface; measuring the total force exerted by the tilted pen array on the surface; and repeating the tilting and measuring steps until a global maximum of the total force exerted on the surface by the pen array is measured, thereby determining first and second angles which correspond to a leveled position of the pen array with respect to the surface. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3615226-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11318637-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018046088-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018144824-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10459004-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101390063-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10599043-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110114682-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018217183-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9081272-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9971239-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014304861-A1 |
| priorityDate |
2009-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |