| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_179dac0477d5c5023497df64daf62e32 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-007 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-406
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02639
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02433 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-20 |
| filingDate |
2011-03-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2cb1af7908516c92b5b1a1dde890f21a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98605d0e32415141aa235942034e2f7c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_787b6a89d2da6fcb30d700c769fa720a |
| publicationDate |
2011-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011163323-A1 |
| titleOfInvention |
GaN SINGLE CRYSTAL SUBSTRATE AND METHOD OF MAKING THE SAME |
| abstract |
The method of making a GaN single crystal substrate comprises a mask layer forming step of forming on a GaAs substrate 2 a mask layer 8 having a plurality of opening windows 10 disposed separate from each other; and an epitaxial layer growing step of growing on the mask layer 8 an epitaxial layer 12 made of GaN. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9853182-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012076968-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016049554-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011204378-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014361247-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016076168-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8716049-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011156213-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015236102-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9653649-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10100434-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8829658-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9899564-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10253432-B2 |
| priorityDate |
1997-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |