http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011151134-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e7e0e42cba4bee6c48312821708b5d3a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B28B7-36 |
| filingDate | 2009-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b348ad4907474e921600b0f6c8b1eb4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad6a379cab2981be0bea5c7f458887fd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de03a0e54c9a100d6f86c832ba3152c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2ec95b232591a66d600d24595a59cb4 |
| publicationDate | 2011-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2011151134-A1 |
| titleOfInvention | Method for manufacturing micro-nano imprint mould and imprinting process |
| abstract | A method for manufacturing a micro-nano imprint mould and an imprinting process are described. The method for manufacturing a micro-nano imprint mould includes: providing a mould body including a first surface and a second surface on opposite sides, wherein the mould body includes an imprinting pattern structure set in the first surface, and the imprinting pattern structure includes a plurality of concaves and a plurality of convexes between the concaves; and performing a surface treatment step on the first surface of the mould body to make a first contact angle form between an imprint fluid and the concaves and a second contact angle form between the imprint fluid and the convexes, wherein the first contact angle is different from the second contact angle. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11422291-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018208229-A1 |
| priorityDate | 2009-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.