| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2201-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2201-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B2201-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P40-57
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B2201-42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03B19-1423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C4-0085 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B19-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03B19-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-60 |
| filingDate |
2010-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b299bd19b4744fb2c228f51fb7e227ea
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82773856e32b109ccb005309603f2774 |
| publicationDate |
2011-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011117480-A1 |
| titleOfInvention |
Titania and sulfur co-doped quartz glass member and making method |
| abstract |
A titania and sulfur co-doped quartz glass member is provided. Due to co-doping of titania and sulfur, the quartz glass member undergoes zero expansion at a certain temperature and low thermal expansion over a wide temperature range, and is thus suited for use in a commercial EUV lithography tool. A manufacturing method and an optical member for EUV lithography are also provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013316890-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8567214-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011314868-A1 |
| priorityDate |
2009-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |