Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4efee27937b4a512f45809fed5293747 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-107 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-10778 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-10794 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D3-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D3-14 |
filingDate |
2011-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4480488e22c3f9948b0e0df32ee66eee |
publicationDate |
2011-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2011114469-A1 |
titleOfInvention |
Process and System for the Purification of Trichlorosilane and Silicon Tetrachloride |
abstract |
The present disclosure relates to processes and systems for purifying technical grade trichlorosilane and/or technical grade silicon tetrachloride into electronic grade trichlorosilane and/or electronic grade silicon tetrachloride. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2778133-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013284585-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10011493-B2 |
priorityDate |
2004-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |