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publicationDate 2011-05-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2011104992-A1
titleOfInvention Polishing solution for metal films and polishing method using the same
abstract A polishing solution for metal films that comprises an oxidizing agent, a metal oxide solubilizer, a metal corrosion preventing agent, a water-soluble polymer and water, wherein the water-soluble polymer is a copolymer of acrylic acid and methacrylic acid, the copolymerization ratio of methacrylic acid in the copolymer being 1-20 mol % based on the total of acrylic acid and methacrylic acid.
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